Volume 11 - Volume 11
Design and Displacement Analysis of Three different Cantilever based MEMS Piezoresistive Pressure Sensor with Polymer (PDMS/PMMA) Thin Flim
Abstract
This paper mainly focuses on to get high displacement from polymer based piezoresistive cantilever
for MEMS/NEMS pressure sensor applications. The displacement has been analyzed and compared
with three different cantilever using PDMS (Poly dimethyl siloxane) and PMMA (Poly methyl
methacrylate) materials. The p-type silicon piezoresistors connected the form based on wheat stone
bridge to get high sensible pressure sensor with respect to low response. An according to get high
displacement, obviously the other performance of parameters such as stress, strain gets high range.
So, this analyzed cantilever structure used to design a pressure sensor with high sensitivity. The
design and simulation are done by using COMSOL Multiphysics.
Paper Details
PaperID: 1786
Author's Name: K. Kavitha, P. Shanmugaraja and R.P. Bhenesha Shree
Volume: Volume 11
Issues: Volume 11
Keywords: MEMS/NEMS Pressure Sensor, PDMS, PMMA, Displacement, COMSOL.
Year: 2021
Month: April
Pages: 1629-1640